Hello everyone, I’m Theodore Li, Technical Director at HONPINE. In semiconductor manufacturing equipment, rotary motion is not simply about making a mechanism rotate. Limited installation space, cable and tube routing, low-speed stability, precise positioning and continuously adjustable motion profiles can all influence the performance of the machine. This is why harmonic rotary actuators are becoming an important motion solution for semiconductor equipment. In this article, I will discuss how harmonic transmission, FOC-based motor control, encoder feedback, large hollow-shaft design and flexible mechanical interfaces work together to meet practical semiconductor motion requirements, based on our experience with developing equipment, overhead transport, wafer handling, cleaning and crystal-growth applications.