Harmonic Drive Reducer, RV Reducer Gearbox, and Precision Planetary Reducer Help Wafer Handling Systems Achieve Higher Levels of Automation
With the continuous advancement of technology, wafer handling robots are gradually achieving higher levels of automation to meet the demands and challenges of the semiconductor manufacturing industry.
The harmonic drive reducer, due to its zero-backlash, ultra-high precision (arc-second level), and lightweight characteristics, is commonly used in equipment such as wafer handling arms (Wafer Handler), lithography machines (Lithography), and cleanroom-compatible machinery.
The RV reducer gearbox, owing to its high rigidity, high torque, and long lifespan, is frequently employed in the base of load-handling robotic arms.
The precision planetary reducer, with its high torque density and compact structure, is widely used in devices such as wafer conveyor belts, indexing rotary tables, and wafer pre-aligners.